Large-Aperture XY Motion Stage Boosts Precision and Throughput in Scanning and Automation

Made in the USA, this 310 x 310 mm direct-drive XY stage combines a large open aperture, 1 nm encoder resolution, fast acceleration and high speed – ideal for semiconductor applications.

Shrewsbury, MA - For applications that require high precision but do not justify the use of air bearings, PI's new V-700 series mechanical bearing XY stages are among the most capable low-profile XY-positioning systems available. The V-783 high-precision XY linear motor stage provides long travel, nanometer-level positioning, and smooth high-speed scanning. Designed and manufactured in the USA, the stage features a 360x360mm aperture and is optimized for semiconductor inspection, photonics alignment, metrology, imaging, biotechnology, laser microprocessing, precision assembly, microscopy, and advanced automation systems.

The stage offers ±155mm travel in each axis (>12") in a compact monolithic XY configuration that combines a lower profile with greater stiffness than conventional designs made of individual direct-drive linear stages. The large open-aperture enables transmissive light applications, while direct-drive brushless ironless linear motors eliminate backlash and drivetrain play for smooth, highly repeatable multi-axis motion.

Key Specifications
• 12.2x12.2" travel (310×310mm) - ideal for 300mm wafers
• 360x360mm aperture - for transmissive light applications
• 1 nm encoder resolution; incremental or absolute encoder options
• 1 m/s velocity and 10 m/s² acceleration
• ±0.07 µm repeatability; ±0.17 µm positioning accuracy
• 0.75 µm straightness and flatness
• Monolithic XY design with 50 kg load capacity and high stiffness
The absolute encoder option provides immediate position information after power-up, eliminating homing procedures and improving machine availability.

Motion Controllers and Software
Combined with PI's A-800 series, ACS-based motion controllers, the stage becomes part of a high-performance motion system supporting synchronized multi-axis operation, EtherCAT networking, and advanced servo-control capabilities. For applications that don't require air bearing performance, the V-783 stage is a great choice. Combining direct-drive performance, nanometer-resolution feedback, high geometric accuracy, and long travel in a compact design, the stage provides OEMs and system builders with a robust positioning platform for precision inspection, manufacturing, and automation applications.

Industries Served and Applications
Semiconductor manufacturing, photonics, optical inspection, flat panel display inspection, metrology, microscopy, laser processing, precision automation.